X-ray fluorescence spectrometry (XRF) is an analytical technique used to determine the chemical composition of various sample types, including solids, liquids, slurries, and powders. It can also be used to determine the thickness and composition of layers and coatings. It can analyze a wide range of elements, from beryllium (Be) to uranium (U), covering concentrations from 100 wt% to less than one part per million.

It is widely used in various industries and scientific fields, including materials science, semiconductors, environment, pharmaceuticals, metallurgy, and archaeology.