- Tel：+86 0755-28329695 / +86 0510-85590779
- Email：info@kahkee-instrument.com
This domestically produced high-end semiconductor material growth equipment, benchmarked against AIXTRON’s core technology, is designed specifically for compound semiconductor R&D and mass production. It supports vacuum interconnection between MoCVD and MBE systems, enabling contamination-free and efficient substrate transfer, meeting the needs of both scientific research and industry.
It is used in industrial fields, mass production of high-power LED chip epitaxial radio frequency devices (HEMT), photovoltaic thin-film battery deposition and other fields.
| Epitaxial Equipment Performance | |
|---|---|
| Single furnace capacity | Optional: 19X2”, 15X4”, 8X6”, 5X8” |
| Substrate types | Sapphire (GaAs), Gallium Phosphide (GaP), Indium Phosphide (InP), Silicon (Si), Silicon Carbide (SiC), Gallium Nitride (GaN) |
| Epitaxial growth specifications | Growth rate: 1-4µm/hour |
| Temperature uniformity | <±3℃（at 1000°C） |
| Temperature control range | 100～1200℃ |
| Heating rate | 0.5℃-3℃/s, continuously adjustable |
| Pressure control range | 20-760 Torr, continuously adjustable, accuracy: 3 Torr |
| Reaction chamber design | Made of high-quality, high-temperature and corrosion-resistant materials |
| Substrate rotation speed | 0-1500, continuously adjustable |
| Vacuum tightness | Piping system leakage rate: <1×10-9 Pa·L/S |
| Reaction chamber leakage rate: <3×10-9 Pa·L/S | |
| Key Technological Breakthroughs | |
|---|---|
| Vacuum interconnect technology | A proprietary transition chamber design enables full-process vacuum integration between MoCVD and MBE systems, preventing oxidation contamination to substrate |
| Dual-zone reaction chamber | Independent temperature control modules supports process switching for GaN, Ga₂O₃, and 2D materials, improving R&D efficiency by 40% |
| Industrial-grade reliability | Modular design ensures >8,000 hours of trouble-free operation throughout the year, with a mass production yield of ≥99.5% |
Address: No. 1, Jikang Road, Kengzi Subdistrict, Pingshan District, Shenzhen, Guangdong Province
Hotline: +86 0755-28329695 / +86 0510-85590779
Email: info@kahkee-instrument.com
