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SUEM (Scanning Ultrafast Electron Microscope)

SUEM is a scanning electron microscope technology that enables high-resolution imaging and analysis of samples in an extremely short time, enabling the observation of rapid dynamic processes.

It features ultra-high temporal resolution, high spatial resolution, real-time dynamic observation, and multimodal imaging.

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Technical Specifications
Category Item Thermal emission mode In-situ mode Photoemission mode
Key parameters Spatial resolution 3 nm@30 kV 3 nm@30 kV < 10 nm @30 kV
Temporal resolution 1 ps @30 kV
Accelerating voltage 500 V ~ 30 kV 500 V ~ 30 kV 500 V ~ 30 kV
Filament Lanthanum hexaboride
Detector In-column electron detector Conventional SE detector Laser-shielded SE detector
Laser shielding efficiency >99.8%
Sample chamber Camera Infrared monitoring camera
Sample stage Five-axis stage, multi-physics excitation stage, compatible with TEM multi-physics stages, transport measurements
Laser parameters Wavelength Probe (257.5 nm, 355 nm), Pump (355 nm, 515 nm, 1030 nm)
Pulse width 300 fs
Repetition rate 5 kHz ~ 5 MHz (continuously adjustable)
Energy 40 uJ @5 MHz
Laser spot size Probe (FHWM: 40 um), Pump (FHWM: 40 um)
Laser incident angle 0~60° (multiple variables)
Software Automatic time-resolved data acquisition and processing
Key parameters Spatial resolution 3 nm@30 kV 3 nm@30 kV < 10 nm @30 kV
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